
0 DOC
RS-VAC-VC1
Intelligent Vacuum Process Control System
An integration platform for vacuum pressure, flow, valves, pumps and safety interlocks.
控制項目壓力、流量、閥件、幫浦與聯鎖控制核心PLC / MCU / IPC資料紀錄趨勢、事件、警報與批次資料
真空腔體、壓力流量、聯鎖控制與製程開發。
真空腔體、壓力流量、聯鎖控制與製程開發。

An integration platform for vacuum pressure, flow, valves, pumps and safety interlocks.