0 DOC
RS-VAC-VC1
Intelligent Vacuum Process Control System
An integration platform for vacuum pressure, flow, valves, pumps and safety interlocks.
控制項目壓力、流量、閥件、幫浦與聯鎖控制核心PLC / MCU / IPC資料紀錄趨勢、事件、警報與批次資料
Vacuum Technology
Vacuum chambers, pressure/flow, interlocks and process development.
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1 PRODUCTSVacuum Technology
Vacuum chambers, pressure/flow, interlocks and process development.